Facilities and Spaces at the Advanced Center for Electronic Devices and Materials

Advanced Center for Electronic Devices and MaterialsCentered on ENG III 1F, 2F, and the rear-building 3F, the center provides an end-to-end device fabrication and research platform spanning semiconductor thin-film epitaxy, micron-scale pattern definition, and back-end packaging and bonding.

50 years of electrical engineering, a new generation of equipment. The renewed NTHU ENG III ACE connects core facilities, cleanroom operations, and interdisciplinary research services.

Core facilities

• Core Facilities I @ R108: 8-inch Maskless Stepper MLA150; minimum pitch size 600 nm; resolution 500 nm.

• Core Facilities II @ R212: Neutral-Beam Etcher.

• Core Facilities III @ R212: Atomic Layer Deposition (ALD).

• Core Facilities IV @ R212: Thermal Evaporation.

• Core Facilities V @ R209: MOCVD Cluster / M3D-ICs.

Access, training, and self-operation workflow

1. First-time applicants: complete the cleanroom self-operation application, Environmental Health and Safety Center training, and semiconductor training.
2. Access card: apply for access privileges after qualification review.
3. Equipment training: complete operation training for each tool you plan to use.
4. Equipment qualification: pass the assessment to obtain self-operation privileges.
5. Existing access holders: complete any tool-specific training and assessment that remains before self-operation.

Key usage rules

• Access requirements: complete EHS instruction, pass the tool assessment, and attend the usage-rules briefing.
• Entry and exit: use your own card; card sharing and group entry on one card are prohibited.
• Acknowledgements: sign the user declaration and the EHS work-rules acknowledgement.
• Chemical work: enter the yellow-light area through the air shower; remove resist from chemical baths promptly; wear gloves, a lab coat, and other required personal protective equipment.
• Chemical labels: transfer bottles must show the chemical name, user, laboratory, and date.
• Violations: three accumulated points result in a 14-day suspension; serious violations may result in a suspension of up to 30 days. Points can be cleared after three months without another violation.