Documentation
Instruments
Instrument categories, access requirements, reservation notes, and training paths for shared ACEDM tools.
Facilities & Equipment Overview
Explore the facility zones, major equipment, qualification path, and booking guidance.
1F R108 Lithography Area
Yellow-light area overview, lithography tools, and preparation notes for 1F R108.
2F R212 Process Equipment
Process equipment for thermal treatment, deposition, etching, and controlled environments on 2F R212.
3F R300 Rear-Building Process Equipment
Deep etching, ALD, bonding, E-GUN, and other back-end process capabilities in rear-building 3F R300.