Instruments
Explore shared instruments by facility area, including access requirements, training, and booking guidance.
Facilities & Equipment Overview
Explore the facility zones, major equipment, qualification path, and booking guidance.1F R108 Lithography Area
Yellow-light area overview, lithography tools, and preparation notes for 1F R108.2F R212 Process Equipment
Process equipment for thermal treatment, deposition, etching, and controlled environments on 2F R212.3F R300 Rear-Building Process Equipment
Deep etching, ALD, bonding, E-GUN, and other back-end process capabilities in rear-building 3F R300.